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Today is 2008. 05. 12
 





Semiconductor
AP Plasma
RF Module

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  Home ¡·Our Products ¡·PEARL KOGYO RF Module
 


¡ß Located in Osaka, Japan.
¡ß Oct, 1953 Founded Taihei RF Laboratory, Osaka, Japan.
     Mar,1966 Built New Headquarter Facility.
     Dec,1968 Renamed as Pearl Kogyo Co., Ltd.
¡ß Pearl Kogyo has been providing top quality High-Power Solid
     State Generators since its founding in 1953.
     It is our mission to develop world-class, customized products
     with unparalleled durability & reliability.
¡ß Pearl Kogyo serves World semiconductor equipment
     manufactures in the area of CVD, PVD, ETCH.
     Our OEM generators are widely used by top manufactures of
     Plasma equipment.


 

P.K Serves Semiconductor and FPD equipment


13.56MHz, 20KW RF Generator



 

Performance of PEARL Product

Section Maker Process Productor
LCD6á¦ÓÛ Sharp Etcher 13MHz, 20KW
LCD6á¦ÓÛ ÁÖ¼º¿£Áö´Ï¾î¸µ CVD 13MHz, 20KW
LCD6á¦ÓÛ AKT CVD 13MHz, 50KW
Semiconductor Samsung Mecha Etcher 2MHz, 60MHz, 100MHz
Semiconductor Samsung Etcher 60MHz, 100MHz
Semiconductor Hynix Etcher 2MHz, 60MHz
Semiconductor TEL Etcher 27MHz, 800kHz
Semiconductor AMAT Etcher 162MHz
Semiconductor HITACHI Asher 450MHz
Semiconductor ULVAC PVD 13MHz




°æ±âµµ È­¼º½Ã žÈÀ¾ ¹Ý¿ù¸® 347-52
Tel : 031) 205 - 5925  Fax : 031) 205 - 5926
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