◆ Radiiontech suggest ESC power supply, Unicon series with
stabilized output, to etcher & CVD system.
◆ This have current limit function, noise free by integrated RF
filter and acquire safety standard,MIC Mark.
◆ Unicon series are suitable for supply DC High voltage to
monopole ESC and apply to FPD & semiconductor.
◆ Unicon series have smart design with easy control and flexiblility,
customized & specialized equipment by Radiiontech.
◆ Input Voltage : 90V ~ 240v ± 10% AC / 50/60 Hz 1Φ 1A max(10W)
◆ Output Monitor : Voltage, Current
◆ Control : Local / Remote Control
◆ Interface : RS-232C Remote Control
◆ Interface terminal : AC 3pin, 9pin D-sub, BNC Connector, GND
◆ Polarity Change : Change Time 90% to 90% 1sec
◆ Temperature : 0℃ to 40℃ (Operation) / -20℃ to +60℃ (Storage)
◆ Ripple : 0.1% rms
◆ Protection : Over Voltage and Output Short Circuit
◆ Control : Remote Control by RS232C Protocol
Local Control by Front Panel Key Pad and 20 by 4 English LCD Display
◆ Product Configuration
◆ Specially Designed for Monopole Electrostatic Chuck Application
◆ Polarity Change and Output Voltage Control with Remote Signal
◆ Regulated Voltage
◆ Output Voltage and Current Monitor
◆ Voltage Output(+ or -)
◆ Integrated RF Filter
◆ Long Life and High reliability with Vacuum Reed Relay
◆ Option-Test Software - O/S MS-Windows
◆ Unicon-01K Output Voltage : 0 to ± 1KV / Max Output Current : 10mA
◆ Unicon-05K Output Voltage : 0 to ± 5KV / Max Output Current : 2mA
◆ Unicon-10K Output Voltage : 0 to ± 10KV / Max Output Current : 1mA
경기도 화성시 태안읍 반월리 347-52 Tel : 031) 205 - 5925 Fax : 031) 205 - 5926
◆ Radiiontech suggest ESC power supply, Unicon series with
